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Author(s): |
Ming-lei Wang, Mudanjiang Normal College Key Laboratory of New Carbon-based Functional and Super-hard Materials of Heilongjiang Province,Mudanjiang, china, 157012
Lei Yao, Mudanjiang Normal College Key Laboratory of New Carbon-based Functional and Super-hard Materials of Heilongjiang Province,Mudanjiang, china, 157012
Chang-shan Xue, Mudanjiang Normal College Key Laboratory of New Carbon-based Functional and Super-hard Materials of Heilongjiang Province,Mudanjiang, china, 157012
Yu-qiang Chen, Mudanjiang Normal College Key Laboratory of New Carbon-based Functional and Super-hard Materials of Heilongjiang Province,Mudanjiang, china, 157012
Hong-yan Peng, Mudanjiang Normal College Key Laboratory of New Carbon-based Functional and Super-hard Materials of Heilongjiang Province,Mudanjiang, china, 157012 |
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Abstract: |
The nanocrystalline diamond films that prepared in CH4/N2/H2 mixtures are synthesized by DC hot-cathode PCVD system. The result shows that with the increasing of nitrogen flow rate, crystal refinement, grain boundary, dislocation and defects are increasing, the surface of films change from the larger micro-crystal particle to cauliflower-like structures, and the surface roughness of films get smaller correspondingly, the content of non-diamond carbon in the films increases. When the C: N = 1:1, the diamond films resistivity drop to 10-1Ω·cm，the carrier concentration is 1018cm-3. With the further increase of nitrogen flow rate, the film resistivity essentially unchanged
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