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A. H. Epstein, S. D. Senturia, G. Anathasuresh, A. Ayon, K. Breuer, K.-S. Chen, F. F. Ehrich, G. Gauba, R. Ghodssi, C. Groshenry, S. A. Jacobson, J. H. Lang, C.-C. Lin, A. Mehra, J. O. Mur Miranda, S. Nag1e, D. J. Orr, E. Piekos, M. A. Schmidt, G Shir1ey, S. M. Spearing, C. S. Tan, Y.-S. Tzeng and I. A. Waitz, “Power Mems and Microengines,” International Conference on Solid State Sensors and Actuators, Chicago, 16-19 June 1997, pp. 753-756.

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