"
Recovery Method of Pyrolytic Carbon Surface after Exposure to Chlorine Trifluoride Gas"
written by Masaya Hayashi, Keisuke Kurashima, Hitoshi Habuka, Akio Ishiguro, Shigeaki Ishii, Yoshiaki Daigo, Hideki Ito, Ichiro Mizushima, Yoshinao Takahashi,
published by
Advances in Chemical Engineering and Science,
Vol.11 No.1, 2021
has been cited by the following article(s):
[1]
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Lowest Concentration of Chlorine Trifluoride Gas for Cleaning Silicon Carbide Chemical Vapor Deposition Reactor
ECS Journal of Solid State Science and Technology,
2022
DOI:10.1149/2162-8777/ac889d
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